Novel Nanocomposite Coatings: Advances and Industrial Applications.pdf
Synthesis of New Nanostructured Materials Nanocrystalline Materials Multilayers and Superlattices Nanocomposite Films Thin Film Processing Principles of Plasma Discharges Physical Sputtering and Transport of Sputtered Material Sputter Deposition Techniques. Reactive Sputter Deposition Film Formation and Structure of Sputtered Material Interface Formation Nucleation and Growth Microstructure of Thin Films, Structure Zone Models, Advantages and Limitations of Sputter Deposition Processes Structure-Property Relation in Hard Films Me-Si-N Films With a Low and Intermediate Si Content Structure, Morphology and Phase Composition Hardness and Macrostress Oxidation Resistance Problems with Reproducibility Novel nanocomposite films - Zr-Si-N Films with a High Si Content Deposition Rate Elemental Composition Chemical Bonding and Phase Composition Electrical and Optical Properties Structure. Morphology Surface Roughness Mechanical Properties Macrostress Effect of Substrate Bias Thermal Stability Oxidation Resistance High Si-containing W-Si-N Nanocomposite Films Deposition Rate Elemental Composition Chemical Bonding and Phase Composition Structure Morphology Surface Roughness Mechanical Properties Macrostress Oxidation Resistance Characterization of Thin Films. Mechanical Properties X-Ray Diffraction Analysis Stress Measurement Film Thickness Measurement Scanning Electron Microscopy Energy Dispersive X-Ray Spectrometry Differential Scanning Calorimetry Thermogravimetric Analysis
Nanocomposite materials as a special class of nanostructured materials have recently attracted great interest due to their extraordinary mechanical properties as well as thermal stability and oxidation resistance. The unique structure and exceptional properties make nanocomposite materials a possible alternative to traditional polycrystalline materials, which have met their limits in many recent engineering applications. Especially nanocomposite coatings synthesized by plasma assisted deposition processes under highly non-equilibrium conditions provide a high potential for new applications as protective and functional coatings in automotive, aerospace, tooling, electronic or manufacturing industry. Novel Nanocomposite Coatings provides a comprehensive overview of the synthesis of Si-containing hard nanocomposite coatings based on transition metal nitrides by plasma-based thin film processing. Full versatility of these nanocomposites is demonstrated for low Si-containing coatings tailored with superior mechanical properties and novel high Si-containing nanocomposite coatings with extraordinary thermal stability and resistance against oxidation optimized for high-temperature applications. A special attention is paid to understanding growth mechanisms of these structures under specific deposition conditions, structure-property relations and stability of individual constituents to enhance their functionality for various applications.